Full modularity and flexibility
● Precise warpage and CTE measurement on a micron scale across temperature range of RT to 300°C
● Scanning and multiscale available
| MEASUREMENT TECHNOLOG | PHASE SHIFT PROJECTION MOIRÉ |
| CAMERA RESOLUTION | 12 mpixel |
| DATA ACQUISITION | <2 second |
MAX SAMPLE SIZE | 800 x 600 mm |
MIN SAMPLE SIZE | 0.5 x 0.5 mm |
MAX TEMPERATURE | 300°C |
MIN TEMPERATURE | RT |
MAX HEATING RATE | 2°C/s on typical 600 x 600 graphite plate |
MIN COOLING RATE | -1.5°C/s on typical 600 x 600 graphite plate |
HOMOGENEITY (*) | < ±10°C/s over 600 x 600 graphite plate (RT to 250°C) |
FOV 20 | FOV 75 | FOV 150 | FOV 300 | FOV 600 | |
FOV SIZE (mm x mm) | ~ 20 x 20 | ~ 75 x 75 | ~ 150 x 150 | ~ 300 x 300 | ~ 600 x 600 |
MAX AMPLITUDE (mm) | 4 | 15 | 15 | 30 | 30 |
Z RESOLUTION (µm) | <1µm | 1.5µm | 2µm | 2.5µm | 6µm |
ACCURACY | < 1µm + 2% | 1.5µm + 2% | 2µm + 2% | 2.5µm + 2% | 6µm + 2% |
DENSITY (px/mm2) | 22 500 | 1 600 | 400 | 100 | 25 |
STRAIN / CTE MODULE | For all FOVs from RT to 300°C |
SCANNING INCLUDED* | For FOV 20 and FOV 75 in 600 x 600 mm area |
MULTISCALE INCLUDED* | For all FOVs |
FOOT PRINT L x W x H | 3 230 mm x 1 500 mm x 1 990 mm |
WEIGHT | 1 000 kg |
ELEC. FACILITIES | 400 V, 3 phases, 120A |
AIR REQUIREMENTS | Compressed air and exhaust |
* Included in standup package
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